| 摘要 |
PURPOSE:To obtain a multilayered spectro-membrane element for soft X-rays, which does not make total-reflection soft X-rays that grade down analyzing accuracy thereof, incident on a soft X-ray detector, nor does grade down intensity of Bragg reflection soft X-rays. CONSTITUTION:A multilayered spectro-membrane element 10 for soft X-rays is provided with a multilayered membrane 12 having Bragg diffraction effect, that is an alternative lamination of a heavy weight element layer 14 and a lightweight element layer 15. A nonparallel multilayered surface part 13 to a lamination surface 18 where the heavy weight element layer 14 and the lightweight element layer 15 are brought into contact with each other, is provided, and the outermost surface is formed of the surface 13. |
