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发明名称
TESTANORDNUNG UND -VERFAHREN FUER INTEGRIERTE SCHALTUNGEN, WOMIT DAS BESTIMMEN VON OBERFLAECHENSCHICHTEFFEKTEN MOEGLICH WIRD.
摘要
申请公布号
DE3878065(D1)
申请公布日期
1993.03.18
申请号
DE19883878065
申请日期
1988.07.06
申请人
SGS-THOMSON MICROELECTRONICS S.A., GENTILLY, FR
发明人
JUGE, ANDRE, F-38120 SAINT EGREVE, FR
分类号
H01L21/66;G01R27/02;H01L29/06;(IPC1-7):G01R27/02
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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