A method for the epitaxial deposition of a substance onto a substrate (20) including providing a sawtooth-profile relief structure (80) on a surface of the substrate and depositing the substance (70) onto the sawtooth-profile relief structure.
申请公布号
WO9305208(A1)
申请公布日期
1993.03.18
申请号
WO1992US07618
申请日期
1992.09.09
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;SPIRE CORPORATION
