| 摘要 |
Heat multilayer aluminum nitride greenware, a composite of layers of aluminum nitride green tape having refractory metal ink pattenrs deposited thereon, in a nonoxidizing atmosphere, at atmospheric pressure to effect liquid phases sintering of both the aluminum nitride greenware and the refractory metal ink. The resultant co-fired structure is substantially free of warpage and has satisfactory thermal conductivity, surface finish, mechanical properties and resistance to delamination. |
