发明名称 A METHOD OF CLEANING USING HYDROCHLOROFLUOROCARBONS HAVING 3 TO 5 CARBON ATOMS
摘要 A method of cleaning a surface of a substrate is provided. The solvent is selected from a group consisting of hydrochlorofluorocarbons having 3 to 5 carbon atoms and a maximum of two chlorine atoms. The environmental lifetime of the solvent is expected to be less than one year.
申请公布号 WO9216674(A3) 申请公布日期 1993.03.18
申请号 WO1992US02154 申请日期 1992.03.18
申请人 ALLIED-SIGNAL INC. 发明人 LI, CHIEN, CHI
分类号 C11D7/50;C23G5/028;D06L1/02 主分类号 C11D7/50
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