发明名称 |
ELECTRICALLY WELL INSULATED SUPPORT ELEMENT FOR A SILICON WAFER USED AS A COMPONENT IN ELECTRICAL AND ELECTRONIC CIRCUITS |
摘要 |
A support element for a silicon wafer used as a component in electrical and electronic circuits comprises a portion for receiving said wafer. According to the invention, the support element comprises at least one free edge raised at an angle to said portion, said raised edge being arranged such that, during the usual coating of the support with electrically insulating material in a known mould, it lies in front of the aperture through which said insulating material is fed into said mould, said raised edge enabling a homogeneous and uniformly thick layer of insulating material to be formed about the support element and in particular on that side of said portion opposite the side on which the silicon wafer is positioned. <IMAGE> |
申请公布号 |
EP0469299(A3) |
申请公布日期 |
1993.03.17 |
申请号 |
EP19910110624 |
申请日期 |
1991.06.27 |
申请人 |
SGS-THOMSON MICROELECTRONICS S.R.L. |
发明人 |
BASSANI, MARIO;ACQUATI, RENATO |
分类号 |
H01L21/56;H01L23/495;(IPC1-7):H01L21/56 |
主分类号 |
H01L21/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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