A PROCESS FOR FORMING VIAS ON INTEGRATED CIRCUITS,申请号EP19870400652-传众专利搜索

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发明名称	A PROCESS FOR FORMING VIAS ON INTEGRATED CIRCUITS
摘要
申请公布号	EP0239489(B1)	申请公布日期	1993.03.17
申请号	EP19870400652	申请日期	1987.03.24
申请人	FAIRCHILD SEMICONDUCTOR CORPORATION	发明人	THOMAS, MICHAEL E.;BROWN, ROBERT L.
分类号	H01L21/3205;H01L21/3213;H01L21/768	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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