发明名称 Transducing device for accurately transducing a physical quantity into an electric signal
摘要 For transducing a physical quantity into an output electric signal, a transducing device comprises lower and upper dielectric substrates and a physical quantity sensor mounted on a predetermined portion of a substrate surface of the lower dielectric substrate for sensing the physical quantity to produce a sensed signal representative of the physical quantity. The upper dielectric substrate has an upper surface and a lower surface which is on a different portion of the substrate surface. In order to receive the sensed signal and produce the output electric signal, an electric circuit is mounted on the upper surface and electrically connected to the sensor through a bonding wire which is shorter than that used in a conventional device. The electric circuit (14) receives the sensed signal through the bonding wire (15) and produces the output electrical signal. The physical quantity may be fluid pressure which a fluid has and is higher or lower than atmospheric pressure. Alternatively, the physical quantity is a velocity which is given to the device. Preferably, the physical quantity sensor has a sensor thermal expansion coefficient substantially equal to a substrate thermal expansion coefficient of the lower dielectric substrate in a direction parallel to the substrate surface.
申请公布号 US5193394(A) 申请公布日期 1993.03.16
申请号 US19910652824 申请日期 1991.02.08
申请人 NEC CORPORATION 发明人 SUDA, MASAHIRO
分类号 G01L9/04;G01L9/00;G01P1/00;G01P15/08;H01L29/84 主分类号 G01L9/04
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