| 摘要 |
A liquid metal ion source which can produce cesium ions stably for a long time in the form of a beam focussed to a micro-spot. The liquid metal ion source is composed of a reservoir containing a liquid metal, and a needle type emitter passing through the reservoir and having a sharp tip end which protrudes from the reservoir, the liquid metal being composed primarily of a cesium compound containing 0.3-20 atom % of oxygen.
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