| 摘要 |
<p>PURPOSE:To prevent deformation of a wafer basket. CONSTITUTION:A projection 8 which corresponds to an index projection 7 which is projectingly provided to a front side of a bar member 6 is projectingly provided to a rear side of the bar member 6 of an end wall 3-1 parallel to the index projection 7. A reinforcing member 11 including a knob 9 is formed approximately all over a width of an end wall 3-2. Therefore, in the bar member 6, a mass is distributed approximately equally both in front and rear sides. Therefore, both front and rear sides of the bar member 6 thermally contracts approximately equally in a length direction due to cooling after mold formation in a manufacturing process of the wafer basket 1. Therefore, warp is not generated in the bar member 6 and deformation of an entire of the wafer basket 1 can be prevented. Since rigidity of the end wall 3-2 can be improved, warp is not generated in the end wall 3-2 and deformation of an entire of the wafer basket 1 can be also thereby prevented.</p> |
