| 摘要 |
PURPOSE:To present a laser optical axis controller which extends the controllable range of the incident beam optical axis to a reference optical axis and simplifies the optical axis adjusting work. CONSTITUTION:First and second convex lenses 1 and 2 are arranged in order on an exit optical path, and a first beam position detecting optical system 4 which detects the position of the beam incident on the first convex lens 1 is provided, and a beam optical axis parallel control means 8 is provided which moves the first convex lens 1 in the direction of the optical axis based on the signal detected by this detecting optical system to make the optical axis of the beam, which is emitted from this lens, parallel with a reference optical axis A. A parallel plane plate 9 is arranged at the rear of the second convex lens 2 on the optical axis, and a second beam position detecting optical system 12 which detects the position of parallel beam B incident on this parallel plane plate 9 is provided. A beam optical axis correcting control means 13 is provided which turns the parallel plane plate 9 based on the signal detected by this detecting optical system to correct the optical axis of an emitted beam C so that this optical axis coincides with the reference optical axis A. |
