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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0563193(A)
申请公布日期
1993.03.12
申请号
JP19910225667
申请日期
1991.09.05
申请人
MITSUBISHI ELECTRIC CORP
发明人
HIGUCHI MITSUMASA
分类号
H01L21/76;H01L21/316;H01L21/336;H01L29/78
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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