FEUILLE ADHESIVE UTILISABLE NOTAMMENT POUR LE DECOUPAGE DE PASTILLES SEMICONDUCTRICES SOUS LA FORME DE MICROPLAQUETTES

摘要

An adhesive sheet according to the present invention comprises a substrate having coated on the surface thereof an adhesive layer consisting of an adhesive and a radiation polymerizable compound, said compound being a urethane acrylate oligomer having a molecular weight of 3,000-10,000, preferably 4,000-8,000. The adhesive sheet is preferably used in subjecting semiconductor wafers to dicing operation and no adhesive sticks to and remains on the back side surface of the wafer chip as picked up.