| 摘要 |
<p>PURPOSE:To provide a wafer keeper which prevents a wafer from dropping out of a stopping groove and prevents damage and contamination of the wafer by surely holding an upper edge of all the wafers. CONSTITUTION:A stopping part of an elastic piece 6 of a wafer keeper is provided with comb-like stopping pieces 8a... 9a.../or 9a..., 9b... and a groove 12 wherewith a wafer is engaged is formed between stopping pieces 8a..., 9a.../or 9a..., 9b.... Furthermore, stopping pieces 8a... and 9b.../and 8b... and 9a... of adjacent elastic pieces 6, 6 are mutually engaged to overlap each other at a side view. Since the wafer is prevented from falling between the elastic pieces 6, 6 by the stopping pieces 8a... and 9b.../or 8b... and 9a..., all the wafers are held engaged with the groove 12 and damage and contamination thereof can be surely prevented.</p> |
