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发明名称
PATTERN FORMATION
摘要
申请公布号
JPH0563002(A)
申请公布日期
1993.03.12
申请号
JP19910244761
申请日期
1991.08.30
申请人
NEC CORP
发明人
TODA TETSU
分类号
H01L21/28;H01L21/338;H01L29/812
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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