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发明名称
WAFER CLEANING METHOD
摘要
申请公布号
JPH0562961(A)
申请公布日期
1993.03.12
申请号
JP19910220441
申请日期
1991.08.30
申请人
SHARP CORP
发明人
ORITA SHIROHIKO;ONISHI SHIGEO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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