END POINT DETECTOR OF PLASMA ETCHER,申请号JP19910225561-传众专利搜索

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发明名称	END POINT DETECTOR OF PLASMA ETCHER
摘要
申请公布号	JPH0562944(A)	申请公布日期	1993.03.12
申请号	JP19910225561	申请日期	1991.09.05
申请人	OLYMPUS OPTICAL CO LTD	发明人	AOKI MASAHIRO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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