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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH0562932(A)
申请公布日期
1993.03.12
申请号
JP19910222996
申请日期
1991.09.03
申请人
OKI ELECTRIC IND CO LTD
发明人
HARADA YUSUKE;TETSUDA HIROSHI
分类号
H01L21/28;H01L21/302
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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