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发明名称
SUBSTRATE RETAINING DEVICE FOR MEASUREMENT OF FILM THICKNESS
摘要
申请公布号
JPH0562901(A)
申请公布日期
1993.03.12
申请号
JP19910219589
申请日期
1991.08.30
申请人
FUJITSU LTD
发明人
HIDAKA NORIO
分类号
H01L21/203;H01L21/66
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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