| 摘要 |
PURPOSE:To facilitate the hermetical sealing of a scintillator and to enhance detection efficiency without lowering resolving power by laminating a panel constituted by embedding scintillators in a plurality of recessed parts and a light detecting panel having a plurality of pixels to integrate both of them. CONSTITUTION:A two-dimensional optical sensor 300 has many pixels 30 formed on a glass substrate 200 as a two-dimensional array and a scintillator embedded panel 400 has many scintillators 42 embedded in many recessed parts of a silicon substrate 41. The pixels 30 and the scintillators 42 respectively correspond to each other at symmetric positions. Since the scintillators 42 are separated at every openings of the substrate 41, cross talk is reduced and, therefore, high resolving power is realized. Further, since the interior of the substrate 41 functions as the reflecting surface of scintillation light, detection efficiency is high. Furthermore, since a reflecting film 44 is provided, detection efficiency further becomes high. Since the deliquescent scintillators are protected by the adhesion of the panel too or the sensor 300, the deterioration of sensitivity is prevented.
|
