| 摘要 |
PURPOSE:To enable resolution in a device for picking up a sectional image using X rays to be improved. CONSTITUTION:X rays from an X-rays source 1 which generates X rays are focused by an optical means 2 for focusing X rays, thus creating a radiation X-rays source. A title item is provided with a control device 6 which allows a sample 3 to be measured to be rotated around a center axis and to be moved along the above center axis, a detector 5 which detects X rays, and a data- processing device 7 which performs analysis operation processing for constituting an X-rays sectional image of the sample 3 to be measured based on an output of the detector 5 and a position information of the sample to be measured. An X-rays source of a device for picking up sectional image using X rays can be reduced extremely by the optical means 2 for focusing X rays, thus obtaining a resolution which is 1mum or less. |
