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发明名称
POSITIONSJUSTIERUNGSVORRICHTUNG MIT EINEM PIEZOELEKTRISCHEN ELEMENT ALS ANHALTEMECHANISMUS.
摘要
申请公布号
DE3687590(D1)
申请公布日期
1993.03.11
申请号
DE19863687590
申请日期
1986.05.01
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP
发明人
YOKOYAMA, KATSUNORI C/O PATENT DIV.;TANUMA, CHIAKI C/O PATENT DIVISION, MINATO-KU TOKYO 105, JP
分类号
B23Q1/28;B23Q1/34;G03F7/20;(IPC1-7):G03B41/00;G03F9/00
主分类号
B23Q1/28
代理机构
代理人
主权项
地址
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