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发明名称
VERFAHREN ZUM ERZEUGEN VON KONTAKTLOECHERN DURCH SILIZIUMNITRID UND POLYIMID.
摘要
申请公布号
DE3780743(T2)
申请公布日期
1993.03.11
申请号
DE19873780743T
申请日期
1987.09.22
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
NANDA, MADAN MOHAN, RESTON, VA. 22 090, US;PETERMAN, STEVEN LOUIS;STANASOLOVICH, DAVID, MANASSAS, VA. 22110, US
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/768;H01L23/522;(IPC1-7):H01L21/31;H01L21/60
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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