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发明名称
BEHANDLUNGSAPPARAT UND -VERFAHREN.
摘要
申请公布号
DE3873848(T2)
申请公布日期
1993.03.11
申请号
DE19883873848T
申请日期
1988.06.23
申请人
TEXAS INSTRUMENTS INC., DALLAS, TEX., US
发明人
LOEWENSTEIN, LEE M., PLANO TEXAS 75074, US;DAVIS, CECIL J., GREENVILLE TEXAS 75401, US
分类号
G03F7/30;C23C16/517;G03F7/42;H01L21/027;H01L21/30;H01L21/302;H01L21/3065;H01L21/31;H01L21/677;(IPC1-7):H01L21/31;C23C16/50
主分类号
G03F7/30
代理机构
代理人
主权项
地址
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