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发明名称
PROCESS FOR SIMULTANEOUS MANUFACTURING OF BIPOLAR AND COMPLEMENTARY MOS-TRANSISTORS ON A COMMON SILICON SUBSTRATE
摘要
申请公布号
EP0232497(B1)
申请公布日期
1993.03.10
申请号
EP19860116737
申请日期
1986.12.02
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
SCHABER, HANS-CHRISTIAN, DR.
分类号
H01L21/8249;H01L29/78;H01L21/28;H01L21/82;H01L27/06
主分类号
H01L21/8249
代理机构
代理人
主权项
地址
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