PRODUCTION OF SILICONE SINGLE CRYSTAL BY CHEMICAL VAPOR PHASE GROWING METHOD AND FRACTIONAL DETERMINATION OF ULTRAMICRO-ELEMENT IN CHLOROSILANE AS ITS RAW MATERIAL AND IN SILICON SINGLE CRYSTAL PRODUCED,申请号JP19920019683-传众专利搜索

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发明名称	PRODUCTION OF SILICONE SINGLE CRYSTAL BY CHEMICAL VAPOR PHASE GROWING METHOD AND FRACTIONAL DETERMINATION OF ULTRAMICRO-ELEMENT IN CHLOROSILANE AS ITS RAW MATERIAL AND IN SILICON SINGLE CRYSTAL PRODUCED
摘要
申请公布号	JPH0558789(A)	申请公布日期	1993.03.09
申请号	JP19920019683	申请日期	1992.02.05
申请人	SHIN ETSU CHEM CO LTD	发明人	KOBAYASHI YOJI;NISHINA YASUHIDE;MIYAO SHUICHI
分类号	C30B29/06;G01N21/64	主分类号	C30B29/06
代理机构		代理人
主权项
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