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经营范围
发明名称
PHOTO-CVD DEVICE
摘要
申请公布号
JPH0559557(A)
申请公布日期
1993.03.09
申请号
JP19910215757
申请日期
1991.08.28
申请人
OSAKA GAS CO LTD
发明人
INOUE NAOKI;NAKAOKA HARUYUKI;AZUMA HIDEKI
分类号
C23C16/48;H01L21/205;H01L21/285;H01L21/31;H01L21/3205
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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