Control and moderation of aluminum in silicon using germanium and germanium with boron,申请号US19920868808-传众专利搜索

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发明名称	Control and moderation of aluminum in silicon using germanium and germanium with boron
摘要
申请公布号	US5192712(A)	申请公布日期	1993.03.09
申请号	US19920868808	申请日期	1992.04.15
申请人	NATIONAL SEMICONDUCTOR CORPORATION	发明人	ARONOWITZ, SHELDON;RAMDE, AMOLAK
分类号	C23C14/48;H01L21/22;H01L21/225;H01L21/265;H01L21/761	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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