Device for supporting a wafer

摘要

A device for supporting a wafer comprises a base plate for arranging the wafer thereabove and a plurality of supports circumferentially arranged on the base plate to support the peripheral of the wafer. In order to expose portions of the wafer covered by the supports, either an annular member to engage with the supports for moving them radially outward, or a roller driven by a motor to rotate the wafer relative to the supports is provided.