发明名称 BOARD CONVEYOR
摘要 PURPOSE:To provide a clean board conveyor which can convey a large-sized board at a high speed without damaging and prevent adherence of dusts to the board. CONSTITUTION:A board conveyor 1 which has magazines 2-5 for containing boards 8, a board placing unit 6 for placing the boards 8, and a conveying robot 7 having conveying arms 14, 15 for holding the boards 8 to displace the arms 14, 15 between the magazines 2-5 and the unit 6, comprises pneumatic actuators 19, 20 for driving the arms 14, 15.
申请公布号 JPH0555786(A) 申请公布日期 1993.03.05
申请号 JP19910215754 申请日期 1991.08.28
申请人 TOSHIBA CORP;TOSHIBA ELECTRON ENG CORP 发明人 TSUCHIYA HITOSHI;FUCHIGAMI YASUHIKO;TAMAI KOICHI;TAKAKUWA SHOICHI
分类号 B25J18/02;H01L21/677;H01L21/68;H05K13/02 主分类号 B25J18/02
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