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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH0555176(A)
申请公布日期
1993.03.05
申请号
JP19910236837
申请日期
1991.08.26
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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