| 摘要 |
PURPOSE:To realize fine residual vibration suppression control by passing an output from an encoder, i.e., a position signal of a mover, through a differentiator to produce a speed signal which is then multiplied by a speed feedback gain through a multiplier and fed back to the drive signal for each phase coil. CONSTITUTION:Upon driving of a pulse motor 46, an encoder 41 detects displacement of a mover 42 to produce a position signal. Differentiators 44a, 44b, provided for respective phases, receive position signals from the encoder 41 and differentiate thus received position signals. Multipliers 45a, 45b, provided for respective phases, receive speed signals from the differentiators 44a, 44b and multiply them by a feedback gain to produce products which are then fed back to the driving signals for respective phase coils 49a, 49b. According to the invention, fine suppression control of residual vibration can be realized. |
