发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent a characteristic of a thin film transistor (TFT) from deteriorating, by preventing the generation of hot carriers which are caused by the electric field between the end part of the gate electrode of the TFT and its drain region. CONSTITUTION:A sidewall spacer 9 is formed on the sidewall of the end part of a gate electrode 8 of a p-channel TFT, which is used as the load transistor of a complete-CMOS-type memory cell. Thereby, relaxed is the electric field formed between the end part of the gate electrode 8 and a drain region 13 formed in a polycrystal silicon film 11, which is so formed as to cover the end part of the gate electrode 8.
申请公布号 JPH0555527(A) 申请公布日期 1993.03.05
申请号 JP19910242616 申请日期 1991.08.28
申请人 NIPPON STEEL CORP 发明人 ANZAI KENJI
分类号 H01L27/11;H01L21/8244;H01L29/78;H01L29/786 主分类号 H01L27/11
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