| 摘要 |
PURPOSE:To accurately discriminate and detect the breaking of wire, abnormal discharge, normal discharge and the like by a method wherein high frequency voltage or pulse is applied to a discharge electrode, and the frequency voltage or pulse voltage in accordance with the discharge voltage of the discharge electrode is detected. CONSTITUTION:The high frequency voltage or pulse generated by a high frequency voltage generator (or square wave pulse generator) 3 is applied to a discharge electrode 17 in a wire bonding device, the high frequency voltage or pulse voltage in accordance with the discharge voltage of the discharge electrode 17 is detected by a voltage detector 4, the detected voltage and the reference voltage are compared by a comparator 6, and based on the above- mentioned comparison output, the disconnection of wire, abnormal discharge, normal discharge, etc., between the discharge electrode 17 and a wire 20 are discriminated and detected by a detector 8. |
