| 摘要 |
PURPOSE:To provide a board conveyor which can always accurately stabilize the quantity of a light of an illumination light source irrespective of change of detecting conditions. CONSTITUTION:The board conveyor 1 comprises a board placing unit 6 for placing glass boards 8 in which an alignment mark 29 is drawn, an illumination light source for illuminating the mark 29 and its periphery, and CCD cameras 22, 23 for imaging the mark 29. The illumination light radiated from the source is reflected on the placing surface 13 of the unit 6, the surface 13 is imaged as the background of the mark 29 by the cameras 22, 23, and the quantity of the light of the source is automatically regulated while monitoring the quantity of the light of the background. |
