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发明名称
PHOTOMECHANICAL PROCESS
摘要
申请公布号
JPH0555139(A)
申请公布日期
1993.03.05
申请号
JP19910245268
申请日期
1991.08.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAITO HIROYUKI
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
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地址
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