| 摘要 |
PURPOSE:To reduce the length of time required for changes between the masking process and the lot process and thus improve throughput in a semiconductor manufacturing equipment which operates according to a large number of operation parameters. CONSTITUTION:Established are at least two memories to which operation parameters required to operate a semiconductor manufacturing equipment are loaded from a file 24 holding a large number of operation parameters. In addition, provided a loading means to load operation parameters to process a lot to the first memory 27 and load operation parameters to process the next lot to the second memory 28 while the equipment is running manufacturing operation according to the operation parameters loaded into the first memory. |
