| 摘要 |
PURPOSE:To provide a multilayer glass ceramic substrate which realizes high density ultra-fine wirings and moreover has excellent mechanical strength to enable high speed operation. CONSTITUTION:A glass ceramic layer of a multilayer glass ceramic substrate including conductors within internal layers is formed in total of 100% wt.% with 12 to 59.6wt.%, of alumina 18 to 69.6wt.% of borosilicate based glass and 1 to 50wt.% of anosite crystal. As raw materials for the manufacture, a mixed powder in total of 100wt.% with 30 to 60wt.% of alumina and 40 to 70wt.% of borosilicate calcium is used, or a mixed powder of alumina, borosilicate based glass and anosite, respectively 0.5-3mum 1 to 5mum, and 1 to 10mum in average grain size is used. |
