| 摘要 |
<p>PURPOSE:To recognize points on a semiconductor chip in a semiconductor manufacturing device without being affected by the personel errors by a method wherein in a recognizing method of the semiconductor manufacturing device, a decision that the form of a triangle formed by linking recognition points with one another is not remarkable or is not characteristic at all is automatically performed on the basis of the ratio of the length of one side of the triangle to the length of a perpendicular to the side. CONSTITUTION:In a recognizing method of a semiconductor manufacturing device, when the longest side of a triangle formed by line segments connecting recognition points A, B and C is the base BC and a perpendicular drawn to the base BC is AP, the ratio (gamma) of the side to the perpendicular = AP:BC is a condition that a triangle is formed. When the value (gamma) obtained on this condition is a prescribed reference value or higher on the side of the manufacturing device, the triangle is automatically judged to be characteristic and necessary recognition is performed. Thereby, there is no possibility that an irregularity in a decision and a recognition due to the difference among operator individuals is generated and a reduction in a working efficiency due to the stop of the manufacturing device based on an erroneous recognition and defective products can be prevented from being generated.</p> |
