摘要 |
PURPOSE:To maintain various performances, such as profile, heat resistance and residual film ratio, and to improve a sensitivity, resolution and value by incorporating an alkali-soluble resin, quinonediazide compd. and a specific phenol compd. into the above compsn. CONSTITUTION:This compsn. contains the alkali-soluble resin, the quinonediazide compd. and the phenol compd. expressed by formula I. In the formula I, R1 and R2 are respectively independently a hydrogen atom or alkyl group, substd. or unsubstd. alkoxy group, substd. or unsubstd. alkenyl group or -OCOR3; at least either of R1 and R3 are groups exclusive of the hydrogen atom; R3 denotes a substd. or unsubstd. alkyl group or substd. or unsubstd. phenyl group; X denotes -CO-, -CR'-R''-, -SO2- or formula II; R' and R'' respectively independently denote a hydrogen atom, substd. or unsubstd. alkyl group or alpha-naphthyl group. In the formula I, the substd. or unsubstd. alkyl group of R1 and R2 may be branched. |