| 摘要 |
PURPOSE:To provide the multilayered antireflection film having high adhesion to a synthetic resin substrate and stable spectral characteristics. CONSTITUTION:The 1st layer on the synthetic resin substrate side is a film mixture constituted of CeO2 and SiO2 formed by binary vapor deposition, the 2nd layer is any film of a CeO2 film, a ZrO2 film, a TiO2 film, a Ta2O5 film, a film mixture composed of ZrO2 and TiO2, or a film mixture composed of ZrO2 and Ta2O5 and the 3rd layer is an SiO2 film. The adhesion to the synthetic resin substrate is enhanced by the 1st layer and the stable spectral characteristics are imparted by the 2nd and the 3rd layer. |
