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发明名称
PROBE CARD
摘要
申请公布号
JPH0555316(A)
申请公布日期
1993.03.05
申请号
JP19910217740
申请日期
1991.08.29
申请人
HITACHI LTD;HITACHI COMPUT ENG CORP LTD
发明人
ISOBE TERUO;NISHIWAKI NOBUHIRO;ISO TADAO
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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