| 摘要 |
2113715 9304072 PCTABS00020 Novel metal .beta.-diketonates are disclosed, including coordination complexes thereof with inorganic and organic donor ligands, useful in CVD applications. These are metal .beta.-diketonates of the formula: M R1C(O)CHC(O)R2 x where M is a metal cation of valency x, preferably a cation of an alkaline earth metal or rare earth metal; R1 is C1-C8 perfluoroalkyl, preferably C1-C5 perfluoroalkyl, preferably straight chain e.g. -CF3 or n-C3F7; R2 is C2-C8 perfluoroalkyl, preferably C2-C6 perfluoroalkyl, again preferably straight chain e.g. n-C3F7 or n-C6F13; and their donor ligand complexes, with either an inorganic donor ligand such as H2O, or an organic donor ligand (Lewis base), or both. Also disclosed is a novel route for the preparation of such complexes.
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