| 摘要 |
<p>A pyroelectric material (13) which operates as a capacitor and thermally driven voltage or current source and rests over a thermally insulating aerogel (5) is disposed over an integrated circuit (3) having pads or the like on the surface thereof of standard type for making connection to an external electrically conductive element. The aerogel is a highly thermally insulating, extremely low mass material on the surface of the integrated circuit with integrated circuit connection areas thereon. The preferred aerogel is a layer of glass which is from about 90 to about 99.8% porous with interconnecting porosity in the form of a rigid foam. Vias (7) are etched through the thermally insulating layer for electrical interconnection between the detector to be formed and the integrated circuit. Two contacts per pixel in the form of an electrically conductive, infrared frequency reflecting layer (11) are deposited upon the insulating layer, one such contact connected to the integrated circuit through the via and the second such contact connected to a bus or another via shared by several pixels. The pyroelectric detector material, which is sufficiently thin to permit a sufficient amount of the infrared frequency radiations impinging thereon to pass therethrough to the reflecting layer therebelow, is deposited upon and between the electrodes. The detector is preferably a ferroelectric, preferably lead lanthanum zirconate titanate. Finally, a top semi-transparent electrically conductive metal layer (15), preferably of nickel, is deposited upon the pyroelectric material. <IMAGE></p> |
