发明名称 |
A wafer basket for containing semiconductor wafers. |
摘要 |
<p>A wafer basket which is provided with a new type of locking and unlocking device for locking the top lid to the main body of the outer box and unlocking the same, wherein it is possible to unlock it by merely pressing a part of the locking and unlocking device inwardly; furthermore, the top lid and the bottom of the main body are shaped such that they fit and engage with each other. <IMAGE></p> |
申请公布号 |
EP0530053(A1) |
申请公布日期 |
1993.03.03 |
申请号 |
EP19920307927 |
申请日期 |
1992.09.01 |
申请人 |
SHIN-ETSU HANDOTAI COMPANY, LIMITED |
发明人 |
OGINO, NOBUYOSHI;YAJIMA, TOSHITSUGU |
分类号 |
B65D21/02;B65D43/02;B65D45/18;B65D85/00;H01L21/673 |
主分类号 |
B65D21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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