| 摘要 |
<p>An electron beam gun for an electron beam evaporation source in which a beam former (68) shields a filament (18) from an anode (56) such that electrons emitted from the filament are accelerated past the anode in a ribbon-like beam. The filament is connected to a split cathode block (12) having two sides (14,16) for applying an electric current through the filament. The beam former has two sections (74,76) with a vertical gap (78) therebetween and the sections are separately connected to the two sides of the cathode block such that the cathode block acts as a heat sink for the beam former, and a thermal gradient is not produced within the beam former that would produce warpage and movement of the beam former. <IMAGE></p> |
