| 摘要 |
PURPOSE:To obtain an appearance inspecting apparatus for a semiconductor device to control the quality with the improved inspecting accuracy and inspecting speed. CONSTITUTION:This apparatus is provided with an illuminating means for illuminating the surface of a semiconductor device, a photoelectric converting device 1a which photographs the surface of the semiconductor device illuminated by the illuminating means and converts and outputs a video signal, and a lightness converting means 1b for converting the video signal output from the photoelectric converting device 1a to digital signal of a predetermined gradation with a suitable sampling frequency. Moreover, this apparatus is provided with a binarizing means 1c for binarizing the digital signal output from the lightness converting means 1b based on the binarization threshold value, a binarized data memory means 1c for storing the binarized data of the binarizing means 1c, and a CPU 1e which determines the binarization threshold value based on the digital signal from the photoelectric converting device 1a of the binarized data and evaluates whether or not a defect of a predetermined size or larger size is present. |
