| 摘要 |
PCT No. PCT/FR89/00630 Sec. 371 Date Oct. 15, 1990 Sec. 102(e) Date Oct. 15, 1990 PCT Filed Dec. 5, 1989 PCT Pub. No. WO90/06489 PCT Pub. Date Jun. 14, 1990.Method for optically measuring submicron dimensions of an object or covering between two objects, and device implementing such method, wherein a light beam (23) is emitted by means of an arc lamp (22) into a system (21) with an optical monofibre (8) having a diameter larger than 500 mu m and a length longer than 3 m, the beam (23) is focussed to the object to be measured through the lens (32) of a microscope, the reflected beam passing through the microscope lens is separated from the incident beam in order to direct it towards the sensors of the matrix cameras (41, 42) of the charge coupling type and the spatial signals thus obtained are processed in order to reconstitute the contours of the object or to measure the covering between the two objects.
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