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发明名称
ION ETCHING METHOD AND DEVICE
摘要
申请公布号
JPH0551773(A)
申请公布日期
1993.03.02
申请号
JP19910212365
申请日期
1991.08.23
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
FURUYA AKINORI;SHIMOKAWA FUSAO
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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