摘要 |
<p>PURPOSE:To facilitate the production of the title piezoelectric element by a method wherein, after producing an extruded product made of a piezoelectric material and having therein a plurality of through holes by an extrusion process, the extruded product is polarized, and electrode is disposed in each through hole, and then the extruded product is cut along a cutting plane across the through holes. CONSTITUTION:A raw material for extrusion, in which a piezoelectric material and an extrusion assistant are uniformly kneaded together, is charged into a cold or hot extruder to be extruded, thereby forming an extruded product 21 having therein many through holes 12 in the form of a matrix. Then, after the extrusion assistant in the extruded product is decomposed and removed by applying a temperature at about 500 deg.C to the extruded product 21, the extruded product is sintered to obtain a sintered body in which the piezoelectric material is densified. Then, the sintered body is polarized by applying a DC electric field to the sintered body under the condition that it is immersed in an insulating silicone oil, and nickel plating (driving electrode) is effected uniformly inside the through holes 12. Thereafter, the resultant extruded product is cut along the A-A plane across the central parts of the through holes 12 arrayed in a row and along the B-B plane across the piezoelectric material portion, whereby desired piezoelectric elements 33 are completed.</p> |